• Journal and proceedings papers (see below)
  
• Patents and published patent applications (see below)
  
• Curriculum vita

Journal Articles

1.  [PDF] A. K. Henning, N. N. Chan, J. T. Watt and J. D. Plummer, “Substrate current at cryogenic temperatures:  Measurements, and a 2-D model for CMOS technology.”  IEEE  Transactions on Electronic Devices  ED-34, pp. 64-74 (1987). 

2.  [PDF] A. K. Henning and J. D. Plummer, “Thermionic emission probability for semiconductor-insulator interfaces.”  IEEE  Transactions on Electronic Devices  ED-34, pp. 2211-2212 (1987). 

3.  [PDF] A. K. Henning and J. L. Dimauro, “Calculation of lateral distribution of interface traps along MIS channel.” Electronics Letters 27, pp. 1445-1447 (1991).

4.  [PDF] E. Fisch, A. K. Henning, and J. Walsh, “A Cerenkov microlaser.”  IEEE J. Quantum Electronics 27, pp. 753-759 (1991).
5.  [PDF] E. E. Fisch, J. E. Walsh, A. K. Henning, and M. F. Kimmitt, “The semiconductor Cherenkov laser.” Nuclear Instruments and Methods in Physics Research A304, pp. 679-682 (1991).
6.  [PDF] F. Rodriguez, A. Filimonov, A. Henning, C. Coughlin, M. Greenberg, “Radiation-induced effects in multiprogrammable pacemakers and implantable defibrillators.” Pacing and Clinical Electrophysiology 14, pp. 2143-2153 (1991).
7.  [PDF] H. F. Wei, A. K. Henning, J.  Slinkman, and W. R. Hunter, “A graphical ellipsometric data reduction algorithm and its application in thin SiO2 film measurement.” Journal of the Electrochemical Society 139, pp. 1783-1790 (1992).
8.  [PDF] X. Tian, F. E. Kennedy, Jr., J. J. Deacutis, and A. K. Henning, “The development and use of thin film thermocouples for contact temperature measurement.”  Tribology Transactions 35, pp. 491-499 (1992).
9.  [PDF] A. K. Henning, T. Hochwitz, J. Slinkman, J. Never, S. Hoffman, P. Kaszuba, and C. Daghlian, “Two-dimensional surface dopant profiling in silicon using scanning Kelvin probe microscopy.”  Journal of Applied Physics 77, pp. 1888-1896 (1995).
10.  [PDF] T. Hochwitz, A. K. Henning, C. G. Levey, C. P. Daghlian, J. Slinkman, “Capacitive Effects on Quantitative Dopant Profiling with Scanned Electrostatic Force Microscopes.”  Journal of Vacuum Science and Technology B 14, pp. 457-462 (1996).

11.  [PDF] T. Hochwitz, A. K. Henning, C. G. Levey, C. P. Daghlian, J. Slinkman, James Never, Phil Kaszuba, Randy Wells, John Pekarik, Bob Gluck, “Imaging Dopant Profiles of Integrated Circuit Devices with the Force-Based Scanning Kelvin Probe Microscope.”  Journal of Vacuum Science and Technology B 14, pp. 440-446 (1996).
12.  [PDF] A. K. Henning and T. Hochwitz, “Scanning Probe Microscopy for 2-D Semiconductor Dopant Profiling and Device Failure Analysis.”  Materials Science and Engineering B42, pp. 88-98 (1996).
13.  [PDF] A. K. Henning, J. S. Fitch, J. M. Harris, E. B. Dehan, B. A. Cozad, L. Christel, Y. Fathi, D. A. Hopkins, Jr., L. J. Lilly, W. McCulley, W. A. Weber, and M. Zdeblick, “Microfluidic MEMS for semiconductor processing.”  IEEE Transactions on Components, Packaging, and Manufacturing Technology B21, pp. 329-337 (1998).
14.  [PDF] A. K. Henning, “Improvements to a compact, pressure- and structure-based compressible gas flow model for microvalves.”  Submitted to IEEE/ASME Journal of Microelectromechanical Systems, February, 2004.  Revised April, 2005.
15.  [PDF] A. K. Henning, “Comprehensive model for thermopneumatic actuators and microvalves.”  IEEE/ASME Journal of Microelectromechanical Systems 15(5), pp. 1308-1318 (2006).

Proceedings Articles

1.  [PDF] J. P. Dishaw, K. R. Kokkonen, J. A. Matthews and A. K. Henning, “Current characterization of SCR latch-up in CMOS circuits.”  IEEE  Transactions on Electronic Devices  ED-30, p. 1582 (1983).
2.  [PDF] A. K. Henning, N. Chan and J. D. Plummer, “Characterization and 2-D simulation of impact ionization current in MOSFETs between 77 and 300K.”  IEEE  Transactions on Electronic Devices  ED-32, p. 2543 (1985).
3.  [PDF] A. K. Henning, N. Chan and J. D. Plummer, “Substrate current in N-channel and P-channel MOSFETs between 77 and 300K:  Characterization and simulation.”  IEEE International Electron Devices Meeting, Digest of Technical Papers, pp. 573-576 (IEEE, Piscataway, NJ, 1985).
4.  [PDF] A. K. Henning and J. D. Plummer, “NMOS FET gate current effects for realistic biases at 80K and 300K.”   Proceedings, Symposium Low Temperature Electronics and High Temperature Superconductors (Electrochemical Society Proceedings,  Vol. 88-9), pp. 130-135 (Electrochemical Society, Pennington, NJ, 1988).
5.  [PDF] A. K. Henning, “Si-SiO2 interface degradation measurement using the floating gate technique.”  Proceedings, Symposium Silicon Nitride and Silicon Dioxide Thin Insulating Films (Electrochemical Society Proceedings, Vol. 89-7), pp. 385-400 (Electrochemical Society, Pennington, NJ, 1989).
6.  [PDF] A. K. Henning, “Low temperature gate current and ‘channel’ hot carriers in MOS transistors.”  IEEE Proceedings of the Workshop on Low Temperature Semiconductor Electronics, pp. 109-113 (IEEE, Piscataway, NJ, 1989).
7.  [PDF] J. L. Dimauro and A. K. Henning, “Lateral distribution of interface states in PMOSFETs.”  IEEE International Electron Devices Meeting, Digest of Technical Papers, pp. 81-84 (IEEE, Piscataway, NJ, 1990).
8.  A. Filimonov, F. Rodriguez, A. Henning, C. Coughlin, and M. Greenberg, “Effects of high-energy radiation on automatic implantable cardioverter defibrillators.”  Medical Physics 17 , p. 210 (1990)
9.  A. Filimonov, F. Rodriguez, A. Henning, C. Coughlin, and M. Greenberg, “Pacemaker response to photon and electron high energy radiation.” Medical Physics 17, p. 210 (1990)
10.  [PDF] F. Rodriguez, A. Filimonov, A. K. Henning, C. Coughlin, and M. Greenberg, “Effects of high-energy radiation on AICDs and programmable pacemakers.”  Proceedings, Third IEEE Symposium on Computer-Based Medical Systems, pp. 182-189 (IEEE, Piscataway, NJ, 1990).
11.  [PDF] C. Hitchcock, T. Cooley, B. Fagin, and A. K.  Henning, “Extension and enhancement of a small microsystem program:  The Dartmouth/IBM interaction.”  Proceedings, Microelectronic Systems Education Conference, p. 233 (1990).
12.  [PDF] A. K. Henning, “Extraction of barrier heights in Si/Si1-xGex heterojunctions with MIS gates.” Electrochemical Society Extended Abstracts 1, p. 404 (Electrochemical Society, Pennington, NJ, 1991).
13.  A. K.  Henning, K. Olander, and M. J. Franklin, “A unified data acquisition and analysis environment for UNIX workstations: Northcalc.”  Presented at the joint ASEE-NSF technical sessions, ASEE annual meeting, Toledo, OH, June 1992.
14.  [PDF] H. F. Wei, A. K. Henning, J. Slinkman, and J. L. Rogers, “Modeling process-dependent thermal silicon dioxide (SiO2) films on silicon,” in The Physics and Chemistry of SiO2 and the Si-SiO2 Interface 2, eds. C. R. Helms and B. E. Deal, pp. 31-41  (Plenum, New York, 1993).
15.  [PDF] T. Hochwitz, A. K. Henning, C. G. Levey, C. P. Daghlian, J. Slinkman, J. Never, P. Kaszuba, R. Gluck, S. Hoffman, and M. O’Boyle, “Failure analysis using scanning Kelvin probe microscopy.”   1994 IBM Failure Analysis Worldwide Technical Exchange, Session O-5 (IBM Microelectronics, Burlington, VT, 1994).
16.  [PDF] A. K. Henning, T. Hochwitz, C. P. Daghlian, J. Slinkman, J. Never, P. Kaszuba, and S. Hoffman, “2D dopant profiling using scanning Kelvin probe microscopy.”  1994 IBM Failure Analysis Worldwide Technical Exchange, Session O-7 (IBM Microelectronics, Burlington, VT, 1994).
17.  [PDF] M. Hargrove, A. K. Henning, J. Slinkman, and J. C. Bean, “Quantum mechanical modeling of the charge distribution in a Si/Si1-xGex/Si p-channel FET.”  IEEE International Electron Devices Meeting, Digest of Technical Papers, pp. 735-738, (IEEE, Piscataway, NJ, 1994).
18.  [PDF] A. K. Henning and C. G. Levey, “Undergraduate research in micro-fabrication science and technology at Dartmouth College.”  ASEE 1994 Annual Conf. Proc., pp. 2599-2606 (American Society for Engineering Education, Washington, DC, 1994).
19.  [PDF] T. Hochwitz, A. K. Henning, C. P. Daghlian, R. Gluck , R. Bolam, P. Coutu, and J. Slinkman, “DRAM failure analysis with the force-based Kelvin probe.”   Int’l. Reliability Physics Symposium, pp. 217-222 (IEEE, Piscataway, NJ, 1995).
20.  [PDF] T. Hochwitz, A. K. Henning, C. G. Levey, C. P. Daghlian, J. Slinkman, “Capacitive Effects on Quantitative Dopant Profiling with Scanned Electrostatic Force Microscopes.”  Proceedings, Third Intl. Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors, pp. 51.1-51.9 (American Vacuum Society, 1995).
21.  [PDF] T. Hochwitz, A. K. Henning, C. G. Levey, C. P. Daghlian, J. Slinkman, James Never, Phil Kaszuba, Randy Wells, John Pekarik, Bob Gluck, “Imaging Dopant Profiles of Integrated Circuit Devices with the Force-Based Scanning Kelvin Probe Microscope.”  Proceedings, Third International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors, pp. 47.1-47.8 (American Vacuum Society, 1995).
22.  [PDF] F. E. Kennedy, A. K. Henning, D. Frusescu, L. M. Caballero, X. Tian, and T. M. Cook, “Temperature sensors for detecting failure of tribological components.”  Proceedings, 49th Meeting, Society for Machinery Failure Prevention Technology (Vibration Institute, Willowbrook, IL, 1995), pp. 281-292.
23.  [PDF] A. K. Henning, “Effects of doping on the dynamic mechanical response of semiconductor cantilevers to electrostatic forces.”  In Proceedings,  Microlithography and Metrology in Micromachining (International Society for Optical Engineering, Bellingham, WA, 1995; M. T. Postek, ed.), volume 2640, pp. 236-245.
24.  [PDF] J. Monberg and A. K. Henning, “Microfabricated sensors for the measurement of electromagnetic fields in biological tissues.”  In Proceedings,  Micromachined Devices and Components (International Society for Optical Engineering, Bellingham, WA, 1995; R. Roop and K. Chau, eds.), volume 2642, pp. 138-148.
25.  [PDF] C.-L. Tsai and A. K. Henning, “Out-of-plane microstructures using stress engineering of thin films.”  In Proceedings,  Microlithography and Metrology in Micromachining (International Society for Optical Engineering, Bellingham, WA, 1995; K. W. Markus, ed.), volume 2639, pp. 124-132.
26.  [PDF] A. K. Henning and C. G. Levey, “The Science and Technology of Micro-machines:  Development of an Undergraduate Course.”  Proc. Eleventh Biennial University/Government/Industry Microelectronics Symposium, pp. 230-236 (IEEE, Piscataway, NJ, 1995).
27.  [PDF] A. K. Henning and M. Jett, “Dynamic Authoring and Retrieval of Textual Information:  DARTEXT.”  Proceedings, Dartmouth Institute for Advanced Graduate Studies (DAGS ‘95), pp. 280-290 (Birkhäuser, Boston, 1995).
28.  M. J. Hargrove, C. E. Hembree, A. K. Henning, J. Slinkman, and Y. Zhang, “Calculation of carrier confinement in buried SiGe layers.”  Paper B3.04, presented (by M. J. Hargrove) at the International Conference on Computational Physics:  PC ’97 (annual meeting of the Computational Physics Division of the American Physical Society, Aug. 25-28, 1997).
29.  [PDF] C.-L. Tsai and A. K. Henning, “Surface micromachined turbines.”  In Proceedings, TRANSDUCERS ’97:  1997 International Solid State Sensors and Actuators Conference, pp. 829-832 (IEEE Press, Piscataway, NJ, 1997).
30.  [PDF] A. K. Henning, J. Fitch, E. Falsken, D. Hopkins, L. Lilly, R. Faeth, and M. Zdeblick, “A thermopneumatically actuated microvalve for liquid expansion and proportional control.”  In Proceedings, TRANSDUCERS ’97:  1997 International Solid State Sensors and Actuators Conference, pp. 825-828 (IEEE Press, Piscataway, NJ, 1997).
31.  [PDF] A. K. Henning, “Microfluidic MEMS for semiconductor processing.”  In Proceedings,2nd Annual International Conference on Innovative Systems in Silicon, pp. 340-349 (IEEE Press, Piscataway, NJ, 1997).
32.  [PDF] A. K. Henning, “Effect of semiconductor surface band pinning on scanning electrostatic force microscopy.”  In Proceedings, Materials and Device Characterization in Micromachining (International Society for Optical Engineering, Bellingham, WA, 1998; C. R. Friedrich and Y. Vladimirsky, eds.), volume 3512, pp. 54-65.
33.  [PDF] A. K. Henning, “Microfluidic MEMS.”  In Proceedings, IEEE Aerospace Conference, Paper 4.906 (IEEE Press, Piscataway, NJ, 1998).
34.  [PDF] J. S. Fitch, A. K. Henning, E. B. Arkilic, J. M. Harris, “Pressure-based mass-flow control using thermopneumatically-actuated microvalves.”  In Proceedings, Solid-State Sensor and Actuator Workshop, pp. 162-165  (Transducers Research Foundation, Cleveland, OH, 1998).
35.  [PDF] A. K. Henning, J. S. Fitch, J. M. Harris, E. B. Arkilic, B. Cozad, and E. B. Dehan, “Performance of MEMS-based gas distribution and control systems for semiconductor processing.”  In Proceedings, SEMICON West Workshop on Gas Distribution (SEMI, Mountain View, CA, 1998).
36.  [PDF] A. K. Henning, J. M. Harris, R. Pearlstein and B. Hertzler, “Contamination reduction using MEMS-based, high-precision mass flow controllers.” In Proceedings, SEMICON West Symposium on Contamination Free Manufacturing for Semiconductor Processing (SEMI, Mountain View, CA, 1998).
37.  [PDF] A. K. Henning, “Liquid and gas-liquid phase behavior in thermopneumatically actuated microvalves.”  In Proceedings, Micro Fluidic Devices and Systems (International Society for Optical Engineering, Bellingham, WA, 1998; A. B. Frazier and C. H. Ahn, eds.), volume 3515, pp. 53-63.
38.  [PDF] A. K. Henning, J. Fitch, J. M. Harris, E. B. Arkilic, B. Cozad, and B. Dehan, “MEMS-based gas distribution and control systems for semiconductor processing.”  In Proceedings, Micromachined Devices and Components (International Society for Optical Engineering, Bellingham, WA, 1998; P. J. French and K. Chau, eds.), volume 3514, pp. 159-170.
39.  [PDF] A. K. Henning, “Compact pressure- and structure-based gas flow model for microvalves.” In Proceedings, Materials and Device Characterization in Micromachining (International Society for Optical Engineering, Bellingham, WA, 2000; Y. Vladimirsky and P. J. Coane, eds.), volume 4175, pp. 74-81.
40.  [PDF] A. K. Henning, B. A. Cozad, E. Lawrence, E. B. Arkilic, and J. M. Harris, “Practical aspects of micromachined gas distribution systems for semiconductor processing.”  In Proceedings, Microfluidic Devices and Systems (International Society for Optical Engineering, Bellingham, WA, 2000; C. H. Mastrangelo and H. Becker, eds.), volume 4177, pp. 251-262.
41.  A. K. Henning, “Performance and Reliability of MEMS-Based Gas Distribution Devices.”  In  Proceedings, Gas Delivery and Analysis Symposium (SEMI, San Jose, CA, 2001).
42.  [PDF] A. K. Henning, A. Zias, N. Mourlas, and S. Metz, “A MEMS-based, high-sensitivity pressure sensor for ultraclean semiconductor applications.”  In Proceedings, 13th IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (ASMC), pp. 165-168 (IEEE, Piscataway, NJ, 2002).
43.  A. K. Henning, “General yield and reliability considerations for MEMS-based flow control systems.”  In Proceedings, 2002 IEEE Microelectronics Reliability and Qualification Workshop (MRQW) (The Aerospace Corp., El Segundo, CA, 2002).
44.  [PDF] E. Lawrence and A. K. Henning, “Long-term drift measurements in MEMS-based mass flow controllers.”  In Proceedings, Reliability, Testing, and Characterization of MEMS/MOEMS II (International Society for Optical Engineering, Bellingham, WA, 2003; R. Ramesham and D. M. Tanner, eds.), volume 4980, pp. 41-50.
45.  [PDF] E. D. Lawrence and A. K. Henning, “Reliability of MEMS-based mass-flow controllers for semiconductor processing.”  In Proceedings, Int’l. Reliability Physics Symposium, pp. 478-483 (IEEE, Piscataway, NJ, 2003).
46.  [PDF] A. K. Henning, “Improved gas flow model for microvalves.”  In Proceedings, TRANSDUCERS 2003:  2003 International Solid State Sensors and Actuators Conference, pp. 1550-1553 (IEEE Press, Piscataway, NJ, 2003).

47.  [PDF] A. K. Henning, S. Patel, M. Selser, and B. A. Cozad, “Factors affecting silicon membrane burst strength.”  In Proceedings, Reliability, Testing, and Characterization of MEMS/MOEMS III (International Society for Optical Engineering, Bellingham, WA, 2004; D. M. Tanner and R. Ramesham, eds.), volume 5343, pp. 145-153.
48.  [PDF] A. K. Henning, “Confirmation of large-periphery compressible gas flow model for microvalves.”  In Proceedings, MEMS/MOEMS Components and Their Applications (International Society for Optical Engineering, Bellingham, WA, 2004; S. W. Janson and A. K. Henning, eds.), volume 5344, pp. 155-162.
49.  [PDF] A. K. Henning, “Micro-pneumatic logic.”  In Proceedings, ASME IMECE 2004, Paper IMECE2004-61334 (ASME, New York, 2004).
50.  [PDF] A. K. Henning, “Concepts for micropneumatic and microhydraulic logic gates.”  In Proceedings, Microfluidic Devices and Systems (International Society for Optical Engineering, Bellingham, WA, 2007; I. Papautsky, ed.), volume 6465.
51.  [PDF] A. K. Henning, “On the reliability of thermopneumatic actuators with silicon membranes.”  In Proceedings, Reliability, Testing, and Characterization of MEMS/MOEMS (International Society for Optical Engineering, Bellingham, WA, 2007; A. Hartzell, ed.), volume 6463.
52.  [PDF] A. K. Henning, “Application concepts for complementary micro-pneumatic devices and circuits.”  In Proceedings, Microfluidics, BioMEMS, and Medical Microsystems VI (International Society for Optical Engineering, Bellingham, WA, 2008; W. Wang, C. Vauchier, eds.), volume 6886.

Patents and Patent Applications

1.  [PDF] J. J. Deacutis and A. K. Henning, “Switchable Thermoelectric Element and Array.”  U.S. Patent Application, filed June 1992.  Granted November 1993 (#5,261,747).  Assigned to Board of Trustees, Dartmouth College.
2.  [PDF] A. K. Henning, M. Zdeblick, J. S. Fitch, D. A. Hopkins, Jr., and L. J. Lilly, “Low-power themopneumatic microvalve.”  U.S. Patent Application, filed June 1997. Granted October 2000 (#6,129,331).  Assigned to Redwood Microsystems, Inc.
3.  [PDF] A. Zias, P. Mauger, S. Cahill, N. Nystrom, and A. K. Henning, “Micro-electromechanical Sensor.”  U.S. Patent Application, filed July 2002. Issued May 2006 (#7,047,814).  Assigned to Redwood Microsystems, Inc.
4.  [PDF] A. K. Henning, M. Selser, and B. A. Cozad, “High-flow microvalve.”  U.S. Patent Application 20050067029, filed April 2004. Issued January 2006 (#6,986,365).  Assigned to SMC KK.
5.  [PDF] A. Zias, P. Mauger, S. Cahill, N. Nystrom, and A. K. Henning, “Micro-electromechanical Sensor.”  U.S. Patent Application, filed July 2001. Issued December 2007 (#7,305,890).  Assigned to SMC KK.
6.  [PDF] J. M. Harris, M. Selser, B. A. Cozad and A. K. Henning, “Dual pedestal shut-off valve.”  U.S. Patent Application, filed March, 2004.  Issued December 2007 (#7,309,056). Assigned to SMC KK.
7.  A. K. Henning, “Micro-pneumatic logic.”  U.S. Patent Application, filed November, 2006.
8.  A. K. Henning, “Micro-hydraulic logic.”  U.S. Patent Application, filed January, 2009.
9.  A. K. Henning, “Complementary micro-pneumatic circuits.”  U.S. Patent Application, filed January, 2010.

Other patent applications in process.