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Aquarian Microsystems provides microtechnology and nanotechnology products and services, as described in more detail below.

Our application areas have been diverse, although our greatest interest in the last decade has been in the realm of microfluidics and microflow devices, applied to: 

• industrial processes;
  
• energy efficiency in refrigeration and air conditioning;
• micro fuel cells;
  
• and other CleanTech arenas.

Clean Tech Open Finalist, 2006 and 2007

What We Do

Aquarian provides state-of-the-art capabilities in the following areas:

• Technology development
• Fabrication process design
  
• Device design and analysis
  
• Process and device metrology and characterization
• Reliability design, testing and analysis
  
• Manufacturing (including packaging)
• Intellectual property research, analysis, and development
  

Our focus is, broadly, on micro-systems technology (MST, or MEMS) and nanotechnology.  Our specific interests and expertise lie in the realm of:

• MOSFETs and semiconductor device physics, including hot carrier effects and high-field transport
• Scanning probe microscopy, related MEMS structures, and nanotechnology applications
  
• Microflow devices, including pressure sensors, pressure and flow controllers, microvalves, microturbines, and integrated systems
• Microfluidics
  

Details

Our technical and product capabilities are found here.

Our technical publications are found here.

Descriptions of our product and service offerings are found here.

Links to our collaborators and colleagues are found here.

A synopsis of our background is found here.

Our contact information, and a comment, suggestion, question, and quotation form, is found here.

The portal for our online course on Microflow Devices through SemiZone is found here.