Conference Proceedings Papers

  1. J. P. Dishaw, K. R. Kokkonen, J. A. Matthews and A. K. Henning, “Current characterization of SCR latch-up in CMOS circuits.”  IEEE  Transactions on Electronic Devices  ED-30, p. 1582 (1983). Download PDF

  2. A. K. Henning, N. Chan and J. D. Plummer, “Characterization and 2-D simulation of impact ionization current in MOSFETs between 77 and 300K.”  IEEE  Transactions on Electronic Devices  ED-32, p. 2543 (1985). Download PDF

  3. A. K. Henning, N. Chan and J. D. Plummer, “Substrate current in N-channel and P-channel MOSFETs between 77 and 300K:  Characterization and simulation.”  IEEE International Electron Devices Meeting, Digest of Technical Papers, pp. 573-576 (IEEE, Piscataway, NJ, 1985). Download PDF

  4. A. K. Henning and J. D. Plummer, “NMOS FET gate current effects for realistic biases at 80K and 300K.”   Proceedings, Symposium Low Temperature Electronics and High Temperature Superconductors (Electrochemical Society Proceedings,  Vol. 88-9), pp. 130-135 (Electrochemical Society, Pennington, NJ, 1988). Download PDF

  5. A. K. Henning, “Si-SiO2 interface degradation measurement using the floating gate technique.”  Proceedings, Symposium Silicon Nitride and Silicon Dioxide Thin Insulating Films (Electrochemical Society Proceedings, Vol. 89-7), pp. 385-400 (Electrochemical Society, Pennington, NJ, 1989). Download PDF

  6. A. K. Henning, “Low temperature gate current and ‘channel’ hot carriers in MOS transistors.”  IEEE Proceedings of the Workshop on Low Temperature Semiconductor Electronics, pp. 109-113 (IEEE, Piscataway, NJ, 1989). Download PDF

  7. J. L. Dimauro and A. K. Henning, “Lateral distribution of interface states in PMOSFETs.”  IEEE International Electron Devices Meeting, Digest of Technical Papers, pp. 81-84 (IEEE, Piscataway, NJ, 1990). Download PDF

  8. A. Filimonov, F. Rodriguez, A. Henning, C. Coughlin, and M. Greenberg, “Effects of high-energy radiation on automatic implantable cardioverter defibrillators.”  Medical Physics 17 , p. 210 (1990) 

  9. A. Filimonov, F. Rodriguez, A. Henning, C. Coughlin, and M. Greenberg, “Pacemaker response to photon and electron high energy radiation.” Medical Physics 17, p. 210 (1990)

  10. F. Rodriguez, A. Filimonov, A. K. Henning, C. Coughlin, and M. Greenberg, “Effects of high-energy radiation on AICDs and programmable pacemakers.”  Proceedings, Third IEEE Symposium on Computer-Based Medical Systems, pp. 182-189 (IEEE, Piscataway, NJ, 1990). Download PDF

  11. C. Hitchcock, T. Cooley, B. Fagin, and A. K.  Henning, “Extension and enhancement of a small microsystem program:  The Dartmouth/IBM interaction.”  Proceedings, Microelectronic Systems Education Conference, p. 233 (1990). Download PDF

  12. A. K. Henning, “Extraction of barrier heights in Si/Si1-xGex heterojunctions with MIS gates.” Electrochemical Society Extended Abstracts 1, p. 404 (Electrochemical Society, Pennington, NJ, 1991). Download PDF

  13. A. K.  Henning, K. Olander, and M. J. Franklin, “A unified data acquisition and analysis environment for UNIX workstations: Northcalc.”  Presented at the joint ASEE-NSF technical sessions, ASEE annual meeting, Toledo, OH, June 1992. 

  14. H. F. Wei, A. K. Henning, J. Slinkman, and J. L. Rogers, “Modeling process-dependent thermal silicon dioxide (SiO2) films on silicon,” in The Physics and Chemistry of SiO2 and the Si-SiO2 Interface 2, eds. C. R. Helms and B. E. Deal, pp. 31-41  (Plenum, New York, 1993). Download PDF

  15. T. Hochwitz, A. K. Henning, C. G. Levey, C. P. Daghlian, J. Slinkman, J. Never, P. Kaszuba, R. Gluck, S. Hoffman, and M. O’Boyle, “Failure analysis using scanning Kelvin probe microscopy.”   1994 IBM Failure Analysis Worldwide Technical Exchange, Session O-5 (IBM Microelectronics, Burlington, VT, 1994). Download PDF

  16. A. K. Henning, T. Hochwitz, C. P. Daghlian, J. Slinkman, J. Never, P. Kaszuba, and S. Hoffman, “2D dopant profiling using scanning Kelvin probe microscopy.”  1994 IBM Failure Analysis Worldwide Technical Exchange, Session O-7 (IBM Microelectronics, Burlington, VT, 1994). Download PDF

  17. M. Hargrove, A. K. Henning, J. Slinkman, and J. C. Bean, “Quantum mechanical modeling of the charge distribution in a Si/Si1-xGex/Si p-channel FET.”  IEEE International Electron Devices Meeting, Digest of Technical Papers, pp. 735-738, (IEEE, Piscataway, NJ, 1994). Download PDF

  18. A. K. Henning and C. G. Levey, “Undergraduate research in micro-fabrication science and technology at Dartmouth College.”  ASEE 1994 Annual Conf. Proc., pp. 2599-2606 (American Society for Engineering Education, Washington, DC, 1994). Download PDF

  19. T. Hochwitz, A. K. Henning, C. P. Daghlian, R. Gluck , R. Bolam, P. Coutu, and J. Slinkman, “DRAM failure analysis with the force-based Kelvin probe.”   Int’l. Reliability Physics Symposium, pp. 217-222 (IEEE, Piscataway, NJ, 1995). Download PDF

  20. T. Hochwitz, A. K. Henning, C. G. Levey, C. P. Daghlian, J. Slinkman, “Capacitive Effects on Quantitative Dopant Profiling with Scanned Electrostatic Force Microscopes.”  Proceedings, Third Intl. Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors, pp. 51.1-51.9 (American Vacuum Society, 1995). Download PDF

  21. T. Hochwitz, A. K. Henning, C. G. Levey, C. P. Daghlian, J. Slinkman, James Never, Phil Kaszuba, Randy Wells, John Pekarik, Bob Gluck, “Imaging Dopant Profiles of Integrated Circuit Devices with the Force-Based Scanning Kelvin Probe Microscope.”  Proceedings, Third International Workshop on the Measurement and Characterization of Ultra-Shallow Doping Profiles in Semiconductors, pp. 47.1-47.8 (American Vacuum Society, 1995). Download PDF

  22. F. E. Kennedy, A. K. Henning, D. Frusescu, L. M. Caballero, X. Tian, and T. M. Cook, “Temperature sensors for detecting failure of tribological components.”  Proceedings, 49th Meeting, Society for Machinery Failure Prevention Technology (Vibration Institute, Willowbrook, IL, 1995), pp. 281-292. Download PDF

  23. A. K. Henning, “Effects of doping on the dynamic mechanical response of semiconductor cantilevers to electrostatic forces.”  In Proceedings,  Microlithography and Metrology in Micromachining (International Society for Optical Engineering, Bellingham, WA, 1995; M. T. Postek, ed.), volume 2640, pp. 236-245. Download PDF

  24. J. Monberg and A. K. Henning, “Microfabricated sensors for the measurement of electromagnetic fields in biological tissues.”  In Proceedings,  Micromachined Devices and Components (International Society for Optical Engineering, Bellingham, WA, 1995; R. Roop and K. Chau, eds.), volume 2642, pp. 138-148. Download PDF

  25. C.-L. Tsai and A. K. Henning, “Out-of-plane microstructures using stress engineering of thin films.”  In Proceedings,  Microlithography and Metrology in Micromachining (International Society for Optical Engineering, Bellingham, WA, 1995; K. W. Markus, ed.), volume 2639, pp. 124-132. Download PDF

  26. A. K. Henning and C. G. Levey, “The Science and Technology of Micro-machines:  Development of an Undergraduate Course.”  Proc. Eleventh Biennial University/Government/Industry Microelectronics Symposium, pp. 230-236 (IEEE, Piscataway, NJ, 1995). Download PDF

  27. A. K. Henning and M. Jett, “Dynamic Authoring and Retrieval of Textual Information:  DARTEXT.”  Proceedings, Dartmouth Institute for Advanced Graduate Studies (DAGS ‘95), pp. 280-290 (Birkhäuser, Boston, 1995). Download PDF

  28. M. J. Hargrove, C. E. Hembree, A. K. Henning, J. Slinkman, and Y. Zhang, “Calculation of carrier confinement in buried SiGe layers.”  Paper B3.04, presented (by M. J. Hargrove) at the International Conference on Computational Physics:  PC ’97 (annual meeting of the Computational Physics Division of the American Physical Society, Aug. 25-28, 1997). 

  29. M. J. Hargrove, A. K. Henning, J. A. Slinkman, and C. E. Hembree, “Self􏰍-Consistent Solution of the Schrödinger and Poisson Equations Applied to Quantum Well Heterostructures .” Technical Report (1998). Download PDF

  30. C.-L. Tsai and A. K. Henning, “Surface micromachined turbines.”  In Proceedings, TRANSDUCERS ’97:  1997 International Solid State Sensors and Actuators Conference, pp. 829-832 (IEEE Press, Piscataway, NJ, 1997). Download PDF

  31. A. K. Henning, J. Fitch, E. Falsken, D. Hopkins, L. Lilly, R. Faeth, and M. Zdeblick, “A thermopneumatically actuated microvalve for liquid expansion and proportional control.”  In Proceedings, TRANSDUCERS ’97:  1997 International Solid State Sensors and Actuators Conference, pp. 825-828 (IEEE Press, Piscataway, NJ, 1997). Download PDF

  32. A. K. Henning, “Microfluidic MEMS for semiconductor processing.”  In Proceedings,2nd Annual International Conference on Innovative Systems in Silicon, pp. 340-349 (IEEE Press, Piscataway, NJ, 1997). Download PDF

  33. A. K. Henning, “Effect of semiconductor surface band pinning on scanning electrostatic force microscopy.”  In Proceedings, Materials and Device Characterization in Micromachining (International Society for Optical Engineering, Bellingham, WA, 1998; C. R. Friedrich and Y. Vladimirsky, eds.), volume 3512, pp. 54-65. Download PDF

  34. A. K. Henning, “Microfluidic MEMS.”  In Proceedings, IEEE Aerospace Conference, Paper 4.906 (IEEE Press, Piscataway, NJ, 1998). Download PDF

  35. J. S. Fitch, A. K. Henning, E. B. Arkilic, J. M. Harris, “Pressure-based mass-flow control using thermopneumatically-actuated microvalves.”  In Proceedings, Solid-State Sensor and Actuator Workshop, pp. 162-165  (Transducers Research Foundation, Cleveland, OH, 1998). Download PDF

  36. A. K. Henning, J. S. Fitch, J. M. Harris, E. B. Arkilic, B. Cozad, and E. B. Dehan, “Performance of MEMS-based gas distribution and control systems for semiconductor processing.”  In Proceedings, SEMICON West Workshop on Gas Distribution (SEMI, Mountain View, CA, 1998). Download PDF

  37. A. K. Henning, J. M. Harris, R. Pearlstein and B. Hertzler, “Contamination reduction using MEMS-based, high-precision mass flow controllers.” In Proceedings, SEMICON West Symposium on Contamination Free Manufacturing for Semiconductor Processing (SEMI, Mountain View, CA, 1998). Download PDF

  38. A. K. Henning, “Liquid and gas-liquid phase behavior in thermopneumatically actuated microvalves.”  In Proceedings, Micro Fluidic Devices and Systems (International Society for Optical Engineering, Bellingham, WA, 1998; A. B. Frazier and C. H. Ahn, eds.), volume 3515, pp. 53-63. Download PDF

  39. A. K. Henning, J. Fitch, J. M. Harris, E. B. Arkilic, B. Cozad, and B. Dehan, “MEMS-based gas distribution and control systems for semiconductor processing.”  In Proceedings, Micromachined Devices and Components (International Society for Optical Engineering, Bellingham, WA, 1998; P. J. French and K. Chau, eds.), volume 3514, pp. 159-170. Download PDF

  40. A. K. Henning, “Compact pressure- and structure-based gas flow model for microvalves.” In Proceedings, Materials and Device Characterization in Micromachining (International Society for Optical Engineering, Bellingham, WA, 2000; Y. Vladimirsky and P. J. Coane, eds.), volume 4175, pp. 74-81. Download PDF

  41. A. K. Henning, B. A. Cozad, E. Lawrence, E. B. Arkilic, and J. M. Harris, “Practical aspects of micromachined gas distribution systems for semiconductor processing.”  In Proceedings, Microfluidic Devices and Systems (International Society for Optical Engineering, Bellingham, WA, 2000; C. H. Mastrangelo and H. Becker, eds.), volume 4177, pp. 251-262. Download PDF

  42. A. K. Henning, “Performance and Reliability of MEMS-Based Gas Distribution Devices.”  In  Proceedings, Gas Delivery and Analysis Symposium (SEMI, San Jose, CA, 2001).

  43. A. K. Henning, A. Zias, N. Mourlas, and S. Metz, “A MEMS-based, high-sensitivity pressure sensor for ultraclean semiconductor applications.”  In Proceedings, 13th IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (ASMC), pp. 165-168 (IEEE, Piscataway, NJ, 2002). Download PDF

  44. A. K. Henning, “General yield and reliability considerations for MEMS-based flow control systems.”  In Proceedings, 2002 IEEE Microelectronics Reliability and Qualification Workshop (MRQW) (The Aerospace Corp., El Segundo, CA, 2002).

  45. E. Lawrence and A. K. Henning, “Long-term drift measurements in MEMS-based mass flow controllers.”  In Proceedings, Reliability, Testing, and Characterization of MEMS/MOEMS II (International Society for Optical Engineering, Bellingham, WA, 2003; R. Ramesham and D. M. Tanner, eds.), volume 4980, pp. 41-50. Download PDF

  46. E. D. Lawrence and A. K. Henning, “Reliability of MEMS-based mass-flow controllers for semiconductor processing.”  In Proceedings, Int’l. Reliability Physics Symposium, pp. 478-483 (IEEE, Piscataway, NJ, 2003). Download PDF

  47. A. K. Henning, “Improved gas flow model for microvalves.”  In Proceedings, TRANSDUCERS 2003:  2003 International Solid State Sensors and Actuators Conference, pp. 1550-1553 (IEEE Press, Piscataway, NJ, 2003). Download PDF

  48. A. K. Henning, S. Patel, M. Selser, and B. A. Cozad, “Factors affecting silicon membrane burst strength.”  In Proceedings, Reliability, Testing, and Characterization of MEMS/MOEMS III (International Society for Optical Engineering, Bellingham, WA, 2004; D. M. Tanner and R. Ramesham, eds.), volume 5343, pp. 145-153. Download PDF

  49. A. K. Henning, “Confirmation of large-periphery compressible gas flow model for microvalves.”  In Proceedings, MEMS/MOEMS Components and Their Applications (International Society for Optical Engineering, Bellingham, WA, 2004; S. W. Janson and A. K. Henning, eds.), volume 5344, pp. 155-162. Download PDF

  50. A. K. Henning, “Micro-pneumatic logic.”  In Proceedings, ASME IMECE 2004, Paper IMECE2004-61334 (ASME, New York, 2004). Download PDF

  51. A. K. Henning, “Concepts for micropneumatic and microhydraulic logic gates.”  In Proceedings, Microfluidic Devices and Systems (International Society for Optical Engineering, Bellingham, WA, 2007; I. Papautsky, ed.), volume 6465. Download PDF

  52. A. K. Henning, “On the reliability of thermopneumatic actuators with silicon membranes.”  In Proceedings, Reliability, Testing, and Characterization of MEMS/MOEMS (International Society for Optical Engineering, Bellingham, WA, 2007; A. Hartzell, ed.), volume 6463. Download PDF

  53. A. K. Henning, “Application concepts for complementary micro-pneumatic devices and circuits.”  In Proceedings, Microfluidics, BioMEMS, and Medical Microsystems VI (International Society for Optical Engineering, Bellingham, WA, 2008; W. Wang, C. Vauchier, eds.), volume 6886. Download PDF

  54. N. A. Amro, J. Haaheim, M. Nelson, J. Fragala, A. Henning, and J. Bussan, “Fully automated nanoscale scanning probe lithography.”  In Proceedings, Technologies for Future Micro Nano Manufacturing, Paper P24.B (Transducers Research Foundation, San Diego, CA, 2011; T. Kenny and M. A. Schmidt, eds.)

  55. J. S. Fragala, A. K. Henning, R. R. Shile, N. Amro, and J. Haaheim, “High-performance, high-density tip arrays for reliable manufacturing.”  In Proceedings, Technologies for Future Micro Nano Manufacturing, Paper P29.A (Transducers Research Foundation, San Diego, CA, 2011; T. Kenny and M. A. Schmidt, eds.)

  56. A. K. Henning, S. Rozhok, J. Fragala, R. Shile, and K. Ouyang, “An all-at-once factorial method to optimize dip-pen deposition of liquid protein inks.”  In Proceedings, Microfluidics, BioMEMS, and Medical Microsystems XI (International Society for Optical Engineering, Bellingham, WA, 2013; H. Becker, ed.). Download PDF

  57. A. K. Henning, J. Fragala, R. Shile, and P. Simao, “Piezoresistive pens for dip-pen nanolithography.”  In Proceedings, Microfluidics, BioMEMS, and Medical Microsystems XI (International Society for Optical Engineering, Bellingham, WA, 2013; H. Becker, ed.). Download PDF

  58. Albert K. Henning, Joseph S. Fragala, R. Roger Shile, Pam Simao, and Sergey Rozhok, “Advances in piezoresistive pens for dip-pen nanolithography.”  In Proceedings of 2013 Nanomechanical Sensing Workshop (NMC2013), pp. 165-166 (The Printing House, Stoughton, WI, 2013). Download PDF

  59. B. Rajendran, A. K. Henning, B. Cronquist, and Z. Or-Bach, “Pulsed Laser Annealing: A scalable and practical technology for monolithic 3D IC.”  In Proceedings, IEEE International Conference on 3D System Integration (3D IC) (IEEE, Washington, DC, 2013). Download PDF

  60. A. K. Henning, B. Rajendran, B. Cronquist, and Z. Or-Bach, “Thermal Considerations for Monolithic Integration of Three-Dimensional Integrated Circuits.” In Proceedings, IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S), pp. 1-2 (IEEE, Washington, DC, 2013). Download PDF

  61. Z. Or-Bach, B. Cronquist, Z. Wurman, I. Beinglass, and A. Henning, “Precision bonders - a game changer for monolithic 3D.” In Proceedings, IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S), pp. 1-3 (IEEE, Washington, DC, 2014). Download PDF

  62. Z. Or-Bach, B. Cronquist, Z. Wurman, I. Beinglass, and A. K. Henning, “Modified ELTRAN®—A game changer for Monolithic 3D.” In Proceedings, IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S), pp. 1-3 (IEEE, Washington, DC, 2015). Download PDF